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Triethylgallium - TEGa

AkzoNobel offers the highest purity triethylgallium under the product name of TEGa SSG (Select Semiconductor Grade). TEGa SSG is used as a gallium precursor for the deposition of compound semiconductors which are used in applications such as light emitting diodes, laser diodes, high performance transistors and high efficiency solar cells. TEGa is mainly used in processes with lower deposition temperatures.


CAS Number: 1115-99-7
Appearance: clear, colorless liquid
Density, 30°C: 1.059 g/ml
Melting point: -82°C
Boiling point: 143°C
Stability to air: ignites upon exposure
Stability to water: reacts violently, may ignite upon contact
Solubility: soluble in aromatic, saturated aliphatic and cycloaliphatic hydrocarbons

Please refer to the Product Data Sheet of TEGa SSG for more information or contact us for detailed specifications. 

TEGa SSG is stable when stored under a dry, inert atmosphere and away from heat. Triethylgallium may undergo exothermic decomposition with gas evolution at elevated temperatures. 

Packaging and transport
Containers are fabricated from stainless steel with an electropolished internal finish and are equipped with dip tube for top discharge and diaphragm valves. The diaphragm valves are equipped with metal gasket face seal connections such as Swagelock® VCR®.

Safety and handling 
Trimethylgallium ignites upon exposure to air and reacts violently with water. Water must be scrupulously removed from process equipment prior to putting it into metal alkyls service. Failure to do so may result in an explosion. At elevated temperatures, TEGa SSG will undergo exothermic decomposition with evolution of extremely flammable gasses. Products of complete combustion of trimethylgallium are gallium oxide, carbon dioxide and water. Trimethylgallium causes severe burns to the skin and eyes. It is imperative that proper personal protective equipment be worn when handling TEGa SSG. 

Please refer to the Material Safety Data Sheet (MSDS) for further information on the safe storage, use and handling of TEGa SSG. This information should be thoroughly reviewed prior to acceptance of this product.

Contact us for more information.